ASML Experience Center
ASML Experience Center
Jul 24, 2022
wearesparks.com
2K views · 78 reactions | If you've ever struggled to explain the 'magic' that happens at ASML to your family and friends, this video is for you to share. Here is a virtual glimpse into our new Experience Center in San Diego - a dynamic, interactive space to understand the science and technology that underpins step zero in the chip manufacturing process. | ASML | Facebook
12:02
2K views · 78 reactions | If you've ever struggled to explain the 'magi…
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FacebookASML
A Deep Dive into Immersion Lithography Technology
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asianometry.com
217 reactions · 4 comments | 【ASML 週報 | DUV 微影系統持續創新中...】...
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217 reactions · 4 comments | 【ASML 週報 | DUV 微影系統持續創 …
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Inside ASML, the wildly successful company that every advanced chipmaker relies on
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Inside ASML, the wildly successful company that every advanced chi…
Mar 23, 2022
CNBCKatie Tarasov
[반도체 이야기] immersion technique 오늘은 현업에서 가장 많이 사용되고 있고, 현재 여러분들이 사용하는 반도체를 생산하는 기술 중 하나인 Immersion 에 대해서 다뤄보려고 합니다. Immersion 은 액침 기술이라고도 하며, 공기 중에서 노광을 진행할 시에 공기가 가지고 있는 NA의 값(0.95) 과 물을 사용하여 NA의 값을 조정하는 역할을 합니다. 궁극적으로 물의 굴절율을 이용하여 레이저를 한 곳에 모으는 역할을 하는데요. 웨이퍼 사이의 공간을 공기가 아닌, 물로 채우면 장비가 물의 특성을 가지고 노광을하게 되는 거죠. 그러면 왜 기름이나 다른 액체가 아닌, 물일까요? 매질로 사용되는 액체는 공정에 영향을 주어서는 안됩니다. 때문에 안정된 수온, 일정한 흐름 제어, 정화, 입자 등 고려해야 하는 조건들이 많은데요. 이를 충족시키는 액체, 초순수(물)을 활용한 immersion 기술은 약 1.4배 확대된 해상도를 제공하고 있습니다. 물을 사용한다는 것 뿐만
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