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Rapidus is first Japanese company to install ASML's cutting-edge EUV machine — chipmaking tool for 2nm chips expected to be operational this yearThe machine features ASML's latest high-power light source, a new wafer handler, faster wafer stages, and other components needed to support increased throughput, enabling the performance of over ...
The systems are configured as cluster tools around an automatic wafer handler, and with factory automation interface. They can process 6 x 150 mm wafers in each chamber, and include a built-in ...
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