Bowed wafers enter the system at two cassette tilt stations. Wafer handling is via a robot fitted with an edge grip end effector. Wafers are oriented on a notch finder, with wafer ID captured by a ...

It supports various substrate types for 6", 8” and 12" wafers. Its versatile handling system supports wafer thicknesses ...

Let us help you with your inquiries, brochures and pricing requirements Request A Quote Download PDF Copy Download Brochure The Proforma 300SA is a semi-automated ...

merge the functionalities of a 300 mm metrology station with a wafer handling system integrated within an Equipment Front End ...

With increased tool and system connectivity, the risk of cyber threats has never been higher. As GEM300 standards get ...